Electrochemical Vapor Deposition of Yttria-Stabilized Zirconia Films

The Vapor Deposition and Oxidation of Platinum- and Yttria-Stabilized Zirconia Multilayers

Attempts to increase the gas temperature within gas turbine engines are driving the development of thermal barrier coatings that reduce superalloy component oxidation rates by disrupting thermal transport processes. Novel metal–ceramic multilayer’s combining thin metal layers with low thermal conductivity oxide ceramics offer a potential approach for impeding both the radiative and conductive t...

An extended Kalman filter for in situ sensing of yttria-stabilized zirconia in chemical vapor deposition

Chemical vapor deposition (CVD) is an important step in integrated circuit fabrication and is a dynamic process that is complex and subject to unmeasured disturbances. Currently in semiconductor industry the main form of advanced process control for CVD is run-to-run (R2R) control. R2R control is a form of discrete process control in which the processing recipe is modified ex situ based on post...

Precursor Decomposition, Microstructure, and Porosity of Yttria Stabilized Zirconia Thin Films Prepared by AerosolAssisted Chemical Vapor Deposition

Microstructures of yttria stabilized zirconia thin fi lms deposited by aerosol assisted chemical vapor deposition (AA-CVD) are correlated with the thermal decomposition behavior of the corresponding metal precursors, zirconium and yttrium 2,4-pentanedionate. Process conditions of AA-CVD are investigated with the aim of producing dense and compact YSZ thin fi lms for applications as gas-tight el...

Characterization study of yttria-stabilized zirconia (YSZ) thin films produced by pulsed laser deposition

Computational Modelling Study of Yttria-stabilized Zirconia